All-strong-state ultraviolet lasers happen to be broadly Utilized in the fields of mechanical flaw detection, lithography, micromachining and medication for the benefits of little volume, lengthy existence, higher efficiency, good beam high quality, wide tuning and slender spectral line, and so forth. Utilizing large energy in the vicinity of-infrared coherent gentle source as the elemental frequency resource determined by nonlinear tuning technological innovation, producing ultraviolet coherent radiation by multistage frequency conversion is considered to be an essential approach to establish the ultraviolet coherent mild supply.
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We summarized The present development position in the large-power DUV laser both within the wavelength of FHG in the one-μm laser and at 193 nm. The latest development on the solid-condition/fiber laser, along with the nonlinear optical crystals, prompts not simply the typical electricity but also the beam good quality (coherence) of your DUV lasers to an unprecedented level.
The typical power from the NIR laser nonetheless has the opportunity being improved to tens of watts like 70 W [26] Should the double-move configuration might be used for your Yb:YAG SCF amplifier phase. Consequently, Should the conversion effectiveness of 31% from NIR to DUV may be nonetheless preserved at this greater electric power situation, the common output power in the DUV laser at 258 nm may very well be greater than 20 W, which might become a remarkable electric power degree for the DUV laser and lead to the unanticipated DUV laser machining outcomes. Also, for prime-ability DUV laser, the UV damage on the nonlinear crystal, such as the Home windows for CLBO crystal plus the mirrors, is another critical parameter for long-term and secure operation.
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A result of the thermal lens result within the solid-point out lasers, In case the heating management is inadequate, It's not easy to get the stable-state laser which has a substantial energy and also a higher beam excellent simultaneously. Not long ago, with the event of the thin disk laser and one-crystal fiber (SCF) laser, a higher-electric power laser at the elemental wavelength (1 μm) were understood with a good beam top quality In spite of a TEM00 manner beam [four,24], which might be superior candidates for the fundamental from the DUV laser generation. An additional candidate for the elemental could be the superior-ability fiber laser which could be achieved by coherent beam mix with M2 benefit a lot less than 1.
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The beam profile proven in Determine 7b shown a very good beam quality as one of several deserves of Raman laser, which might be beneficial to deliver a 193-nm DUV laser with a top quality beam.
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